Title:
PLASMA ATOMIC LAYER GROWTH DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/190007
Kind Code:
A1
Abstract:
The present invention is provided with: a cylindrical, insulating injector adhesion-prevention material that can be attached at a gas introduction opening from inside a film-formation container and that surrounds the gas introduction opening; a cylindrical, insulating exhaust adhesion-prevention material that can be attached at an exhaust opening from inside the film-formation container and that surrounds the exhaust opening; and an insulating film-formation chamber adhesion-prevention material that can be attached at an inner-wall side of the film-formation container. The injector adhesion-prevention material has a gap that is between plate-electrode and facing-electrode sides and has a tip that is positioned to the inside with respect to an end of the plate electrode. The exhaust adhesion-prevention material has a gap that is between plate-electrode and facing-electrode sides and has a tip that is positioned to the inside with respect to the end of the plate electrode. The film-formation chamber adhesion-prevention material is arranged over the injector adhesion-prevention material and the exhaust adhesion-prevention material on both sides of the injector adhesion-prevention material and the exhaust adhesion-prevention material, has a gap that is between plate-electrode and facing-electrode sides, and is provided with an upper inactive-gas supply port by which the inside of the film-formation container is purged with an inactive gas from the gap, with a lower inactive-gas supply port by which the inside of the film-formation container is purged with an inactive gas from gap, with an upper inactive-gas supply part that is connected to the upper inactive-gas supply port, and with a lower inactive-gas supply part that is connected to the lower inactive-gas supply port.
Inventors:
MATSUMOTO TATSUYA (JP)
WASHIO KEISUKE (JP)
WASHIO KEISUKE (JP)
Application Number:
PCT/JP2016/062402
Publication Date:
December 01, 2016
Filing Date:
April 19, 2016
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
International Classes:
H01L21/31; C23C16/44; C23C16/455; C23C16/50; H01L21/3065
Foreign References:
| JP2010212433A | 2010-09-24 | |||
| JP2010212434A | 2010-09-24 | |||
| JP2006351655A | 2006-12-28 | |||
| JP2009062579A | 2009-03-26 | |||
| JP2012052221A | 2012-03-15 | |||
| JP2012126977A | 2012-07-05 | |||
| JPS61163279A | 1986-07-23 |
Attorney, Agent or Firm:
YOKOI Koki (JP)
Koki Yokoi (JP)
Koki Yokoi (JP)
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