Title:
CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/230717
Kind Code:
A1
Abstract:
A charged particle optical system comprising: a permanent magnetic lens which, with respect to an optical axis direction of the charged particle optical system, is disposed on the object side of a central point between a charged particle beam source and an object; an electromagnetic lens which, with respect to the optical axis direction of the charged particle optical system, is disposed with at least a part thereof positioned to overlap the permanent magnetic lens; and an electrostatic lens which, with respect to the optical axis direction of the charged particle optical system, is disposed with at least a part thereof positioned to overlap at least one of the permanent magnetic lens and the electromagnetic lens.
Inventors:
GOTO TAKAKUNI (JP)
ISHIKAWA MOTOFUSA (JP)
OGASAWARA BAKU (JP)
KUSU SHUNTA (JP)
KOMATSU YUTA (JP)
UCHIDA TOMOYA (JP)
ISHIKAWA MOTOFUSA (JP)
OGASAWARA BAKU (JP)
KUSU SHUNTA (JP)
KOMATSU YUTA (JP)
UCHIDA TOMOYA (JP)
Application Number:
PCT/JP2022/018129
Publication Date:
November 03, 2022
Filing Date:
April 19, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H01J37/143; H01J37/145
Domestic Patent References:
| WO2012057166A1 | 2012-05-03 |
Foreign References:
| JPS5914242A | 1984-01-25 | |||
| US20200161079A1 | 2020-05-21 | |||
| JP2021075751A | 2021-05-20 | |||
| US9472372B2 | 2016-10-18 |
Other References:
YURI YOSUKE, FUKUDA MITSUHIRO, YUYAMA TAKAHIRO: "Formation of hollow ion beams of various shapes using multipole magnets", PROGRESS OF THEORETICAL AND EXPERIMENTAL PHYSICS, vol. 2019, no. 5, 1 May 2019 (2019-05-01), pages 1 - 11, XP055981511, DOI: 10.1093/ptep/ptz024
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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