Title:
CHARGED PARTICLE RADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/043391
Kind Code:
A1
Abstract:
Provided is a charged particle radiation device which can suppress the inclination and the vertical vibration of a charged particle optical lens tube, using a simple structure.
The charged particle radiation device is provided with a vibration suppression member (19) wherein viscoelastic sheets (16A, 16B) are sandwiched by support plates (17A, 17B), so that a plane including the sheet surface of each viscoelastic sheet is not perpendicular to the center axis of the charged particle optical lens tube.
Inventors:
TSUJI HIROSHI (JP)
TACHIBANA ICHIRO (JP)
TACHIBANA ICHIRO (JP)
Application Number:
PCT/JP2010/067569
Publication Date:
April 14, 2011
Filing Date:
October 06, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
TSUJI HIROSHI (JP)
TACHIBANA ICHIRO (JP)
TSUJI HIROSHI (JP)
TACHIBANA ICHIRO (JP)
International Classes:
H01J37/16; F16F15/04; H01J37/09
Foreign References:
| JP2005268268A | 2005-09-29 | |||
| JP2008052946A | 2008-03-06 | |||
| JPH0187532U | 1989-06-09 | |||
| JP2004234960A | 2004-08-19 | |||
| JP2000208387A | 2000-07-28 | |||
| JP2001093456A | 2001-04-06 |
Attorney, Agent or Firm:
HIRAKI YUSUKE (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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