CIRCUIT DEVICE INSPECTING ELECTRODE APPARATUS, METHOD FOR MANUFACTURING THE SAME AND CIRCUIT DEVICE INSPECTING APPARATUS

WIPO Patent Application WO/2006/035856

A1

A circuit device inspecting electrode apparatus is provided, wherein connecting electrodes are formed at a small arrangement pitch, while permitting the electrodes to have sufficient insulation, and further, a contact resistance is small. A method for manufacturing such apparatus is also provided. A circuit device inspecting apparatus is provided, wherein prescribed high precision electrical inspection can be performed for all the electrodes to be inspected in a circuit device having a small arrangement pitch of the electrodes to be inspected or in a circuit device having a large number of electrodes. The electrode apparatus is provided with an insulating board; a plurality of connecting electrodes which are arranged at prescribed positions on a front plane side of the insulating board and have flat rear planes; and a plurality of cables integrally connected at one end plane with the rear plane of the connecting electrode, in a status where one end part of each of the cable is fixed to extend by penetrating the insulating board in a thickness direction. The inspecting apparatus is provided with the circuit device inspecting electrode apparatus.

KIMURA KIYOSHI (JP)
SHIMODA SUGIRO (JP)

PCT/JP2005/017924

April 06, 2006

September 29, 2005

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JSR CORP (JP)
KIMURA KIYOSHI (JP)
SHIMODA SUGIRO (JP)

G01R1/06

JP2003222637A	2003-08-08
JPH11204177A	1999-07-30
JP2001015565A	2001-01-19
JP2002062313A	2002-02-28
JP2004239900A	2004-08-26
JP2000241485A	2000-09-08
JPS63208237A	1988-08-29

Ohi, Masahiko (4 Kanda Surugadai 3-chom, Chiyoda-ku Tokyo 62, JP)

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