CONVEYING APPARATUS, CONVEYING METHOD, AND VACUUM EVAPORATION APPARATUS

WIPO Patent Application WO/2018/176918

A1

A conveying apparatus, comprising at least one first conveying member (101) and at least one second conveying member (102); the first conveying member (101) comprises a first bearing pad (103) in contact with a conveying object; the second conveying member (102) comprises a second bearing pad (104) in contact with the conveying object; the ability to gain electrons of the material for the first bearing pad (103) is stronger than that of the material for the second bearing pad (104), and the ability to lose electrons of the material for the second bearing pad (104) is stronger than that of the material for the first bearing pad (103). By changing the relative abilities to gain and lose electrons of the materials for the portions of the conveying members in contact with the conveying object, the adverse effect caused by static electricity is reduced while ensuring large enough friction, so that the rate of conveying the conveying object can be accelerated, the production efficiency can be improved, and the product yield can also be increased.

WANG ZHEN (CN)
LIN ZHIMING (CN)
HUANG CHUN CHIEH (CN)
JING YU (CN)
WU WENZE (CN)

PCT/CN2017/116469

October 04, 2018

December 15, 2017

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BOE TECHNOLOGY GROUP CO LTD (CN)
ORDOS YUANSHENG OPTOELECTRONICS CO LTD (CN)

B65G49/06; C23C14/24; H01L21/677

CN101030528A	2007-09-05
CN1835653A	2006-09-20
JP2003312842A	2003-11-06
CN203021022U	2013-06-26
JP2010222103A	2010-10-07
CN202107331U	2012-01-11
CN101197302A	2008-06-11

LIU, SHEN & ASSOCIATES (CN)

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