Title:
DEFECTIVE PART RECOGNITION DEVICE AND DEFECTIVE PART RECOGNITION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/033417
Kind Code:
A1
Abstract:
The present invention can mechanically recognize the state of a defective part in a multilayer substrate and can perform correction processing that is not affected by the skill of an operator. This defective part recognition device comprises: a microscope that irradiates the surface of the multilayer substrate with white epi-illumination light to obtain a magnified image of a unit area where the defective part is recognized on the surface thereof; a spectroscopic camera that has an imaging surface on which the magnified image is formed, and outputs spectral spectrum information of the magnified image to each pixel of the imaging surface; and an information processing unit that processes the spectral spectrum information output from the spectroscopic camera, wherein the information processing unit includes a machine learning unit that clusters the spectral spectrum information for each pixel, and a defect recognition unit that recognizes the defective part from the processing result of the machine learning unit, the machine learning unit sets a cluster according to a layer structure present in a unit area, and generates a histogram with the number of pixels clustered in the cluster as a frequency, and the defect recognition unit recognizes the defective part according to the presence of clusters having different frequencies by comparing the frequency distribution of the generated histogram with the frequency distribution of a histogram in which there is no defect.
Inventors:
MIZUMURA MICHINOBU (JP)
Application Number:
PCT/JP2020/024371
Publication Date:
February 25, 2021
Filing Date:
June 22, 2020
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
G01N21/88
Foreign References:
| JP2011165479A | 2011-08-25 | |||
| US5991699A | 1999-11-23 | |||
| CN105699385A | 2016-06-22 | |||
| JP2008188638A | 2008-08-21 |
Attorney, Agent or Firm:
EICHI PATENT & TRADEMARK CORP. (JP)
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