Title:
ELECTRON BEAM ASSISTED EEM METHOD
Document Type and Number:
WIPO Patent Application WO/2007/018117
Kind Code:
A1
Abstract:
[PROBLEMS] To provide an electron beam assisted EEM method that can realize ultraprecision
machining of workpieces, including glass ceramic materials, in which at least
two component materials different from each other in machining speed in a machining
process are present in a refined mixed state and the surface state is not even,
to a surface roughness of 0.2 to 0.05 nm RMS. [MEANS FOR SOLVING PROBLEMS] The EEM
method comprises a working process in which a workpiece and chemically reactive
fine particles are allowed to flow along the working face to remove atoms on the
working face chemically bonded to the fine particles together with the fine particles
through chemical interaction between the fine particles and the working face
interface. The workpiece comprises at least two component materials present
in a refined mixed state and different from each other in machining speed in the
machining process. After the exposure of the workpiece in its working face to
an electron beam to conduct modification so that the machining speed of the surface
layer part in the working face is substantially even, ultraprecision smoothening
is carried out by working process.
Inventors:
MORI YUZO (JP)
Application Number:
PCT/JP2006/315388
Publication Date:
February 15, 2007
Filing Date:
August 03, 2006
Export Citation:
Assignee:
MORI YUZO (JP)
International Classes:
B24B1/00; B24B19/22; B24B31/06; B24B37/00
Foreign References:
| JPH10206612A | 1998-08-07 | |||
| JPH071302A | 1995-01-06 | |||
| JP2000040828A | 2000-02-08 | |||
| JP2006159379A | 2006-06-22 | |||
| JPS6427852A | 1989-01-30 | |||
| JP2006021295A | 2006-01-26 | |||
| JPH0716870B2 | 1995-03-01 | |||
| JP3630987B2 | 2005-03-23 | |||
| JP2000167770A | 2000-06-20 |
Other References:
See also references of EP 1920883A4
Attorney, Agent or Firm:
YANAGINO, Takao et al. (15-5 Miyahara 1-chome, Yodogawa-k, Osaka-shi Osaka 03, JP)
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