Title:
ELECTRON BEAM MICROSCOPE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/069325
Kind Code:
A1
Abstract:
This electron beam microscope apparatus is provided with: a vacuum-exhaustible mirror body; an electron gun for generating an electron beam; an electromagnetic lens for focusing the electron beam; a first sample holder for mounting a first sample; a first stage having a first airlock mechanism in which the first sample holder can be introduced inside the mirror body without releasing the air from the mirror body; and a detector for detecting a signal originating as the result of the mutual action of the electron beam and the first sample. The mirror body is provided with an opening part provided with a second airlock mechanism roughly in the same plane as the first sample mounted in the first sample holder, the second airlock mechanism being configured so that a prescribed member can be introduced inside the mirror body without releasing the air from the mirror body.
Inventors:
KIKUCHI HIDEKI (JP)
TAMURA KEIJI (JP)
UEDA KOTA (JP)
SAITOU KOUICHIROU (JP)
NAMEKAWA RYOJI (JP)
INADA HIROMI (JP)
TAMURA KEIJI (JP)
UEDA KOTA (JP)
SAITOU KOUICHIROU (JP)
NAMEKAWA RYOJI (JP)
INADA HIROMI (JP)
Application Number:
PCT/JP2013/078807
Publication Date:
May 08, 2014
Filing Date:
October 24, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/18; H01J37/09; H01J37/16; H01J37/20; H01J37/244
Foreign References:
| JPS5420657A | 1979-02-16 | |||
| JPH04306547A | 1992-10-29 | |||
| JPS6215763U | 1987-01-30 | |||
| JP2011034744A | 2011-02-17 | |||
| JP2002141382A | 2002-05-17 | |||
| JPH04286843A | 1992-10-12 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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