Title:
ETCHING SOLUTION COMPOSITIONS FOR METAL LAMINATE FILMS
Document Type and Number:
WIPO Patent Application WO/2010/095742
Kind Code:
A1
Abstract:
Disclosed are etching solution compositions that comprise fluorine compounds and iron ions, which are used for bulk etching of metal laminate films wherein a layer comprising aluminum or an aluminum alloy is laminated on top and a layer comprising titanium or a titanium alloy on bottom, and an etching method using said etching solution compositions.
Inventors:
KUROIWA KENJI (JP)
NAGASHIMA KAZUAKI (JP)
KATO MASARU (JP)
NOHARA MASAHIRO (JP)
NAGASHIMA KAZUAKI (JP)
KATO MASARU (JP)
NOHARA MASAHIRO (JP)
Application Number:
PCT/JP2010/052662
Publication Date:
August 26, 2010
Filing Date:
February 23, 2010
Export Citation:
Assignee:
KANTO KAGAKU (JP)
SHARP KK (JP)
KUROIWA KENJI (JP)
NAGASHIMA KAZUAKI (JP)
KATO MASARU (JP)
NOHARA MASAHIRO (JP)
SHARP KK (JP)
KUROIWA KENJI (JP)
NAGASHIMA KAZUAKI (JP)
KATO MASARU (JP)
NOHARA MASAHIRO (JP)
International Classes:
H01L21/308; C23F1/20; C23F1/26; G02F1/1368
Foreign References:
| JP2008227508A | 2008-09-25 | |||
| JP2005232559A | 2005-09-02 | |||
| JP2008053374A | 2008-03-06 |
Attorney, Agent or Firm:
KUZUWA, Kiyoshi (JP)
Seiji Kuzuwa (JP)
Seiji Kuzuwa (JP)
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