Title:
FABRY-PEROT INTERFERENCE FILTER
Document Type and Number:
WIPO Patent Application WO/2015/122316
Kind Code:
A1
Abstract:
A Fabry-Perot interference filter (10A) is provided with a fixed mirror (31) and a movable mirror (41) disposed so as to face the fixed mirror (31) via an airspace (S) such that the distance from the fixed mirror (31) in a light transmitting region (11) is adjusted by electrostatic force. In an encircling part (41a) of the movable mirror (41) surrounding the light transmitting region (11) are formed a plurality of first ring-shaped grooves (44) surrounding the light transmitting region (11) and a plurality of first through holes (45) open to the airspace (S) and the side opposite thereto.
Inventors:
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
HIROSE MASAKI (JP)
KAWAI TOSHIMITSU (JP)
KASAHARA TAKASHI (JP)
HIROSE MASAKI (JP)
KAWAI TOSHIMITSU (JP)
Application Number:
PCT/JP2015/052925
Publication Date:
August 20, 2015
Filing Date:
February 03, 2015
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/00; G02B5/28
Foreign References:
| JP2012108371A | 2012-06-07 | |||
| JP2014002261A | 2014-01-09 | |||
| JP2012112777A | 2012-06-14 | |||
| JP2011191661A | 2011-09-29 | |||
| JP2002174721A | 2002-06-21 |
Other References:
See also references of EP 3106910A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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