Title:
JIG
Document Type and Number:
WIPO Patent Application WO/2023/279416
Kind Code:
A1
Abstract:
A jig (100), which is used for a semiconductor etching machine (200) and comprises: a support mechanism (1) configured to be provided on an outer side base of an electronic-static clamp (201) of the semiconductor etching machine (200); a cleaning mechanism (2) rotatably provided on the support mechanism (1); and at least one cleaning unit (3) provided on the cleaning mechanism (2). According to the jig (100), manual operation can be replaced, the part damage risk and part replacement costs are greatly reduced, costs are reduced, the downtime is shortened, the operation duration of a device is prolonged, and the productivity is improved.
Inventors:
WEI ZHONGYANG (CN)
Application Number:
PCT/CN2021/106054
Publication Date:
January 12, 2023
Filing Date:
July 13, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01J37/32
Foreign References:
| CN110834011A | 2020-02-25 | |||
| CN109524325A | 2019-03-26 | |||
| CN112435918A | 2021-03-02 | |||
| CN1770388A | 2006-05-10 | |||
| CN104707832A | 2015-06-17 | |||
| US20090180086A1 | 2009-07-16 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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