Title:
METHOD AND APPARATUS FOR FABRICATING MERCURIC IODIDE POLYCRYSTALLINE FILMS FOR DIGITAL RADIOGRAPHY
Document Type and Number:
WIPO Patent Application WO2003012855
Kind Code:
A8
Abstract:
A method is provided for fabricating in a thermal evaporation system (100) a polycrystalline film capable of directly detecting radiation. Source material (112) is placed in a container, and the container is evacuated to create vacuum within the container. The source material (112) is heated to evaporate the source material for depositing on a substrate (114). The polycrystalline film is used in as deposited form to detect the radiation.
Inventors:
IWANCZYK JAN S
PATT BRADLEY E
PATT BRADLEY E
Application Number:
PCT/US2002/024112
Publication Date:
September 18, 2003
Filing Date:
July 30, 2002
Export Citation:
Assignee:
PHOTON IMAGING INC (US)
International Classes:
G01T1/00; C23C14/06; C23C14/24; C23C14/56; G01T1/20; G01T1/24; H01L27/146; H01L31/115; H04N5/32; (IPC1-7): H01L21/477; C23C14/14
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