Title:
METHOD AND APPARATUS FOR LASER-BEAM PROCESSING AND METHOD FOR MANUFACTURING INK JET HEAD
Document Type and Number:
WIPO Patent Application WO/2013/051245
Kind Code:
A1
Abstract:
In removal processing using a pulsed laser beam, processing deviation occurs in the depthwise direction to cause a processing error in a predetermined removal shape. A first pulsed laser beam (LI) is a pulsed laser beam having a wavelength that exhibits transmittance to a workpiece (6), and a second pulsed laser beam (L2) is a pulsed laser beam having a wavelength that exhibits absorption to the workpiece (6). The first pulsed laser beam LI is focused into the workpiece (6), and a focal point (PI) of the first pulsed laser beam (LI) is scanned along the outline of a predetermined removal region (Rl) to form a modified portion (6A) along the outline of the predetermined removal region (Rl). Next, removal processing is performed by scanning the second pulsed laser beam (L2) in a region enclosed by the modified portion (6A).
Inventors:
MORIMOTO HIROYUKI (JP)
KURACHI KOSUKE (JP)
KURACHI KOSUKE (JP)
Application Number:
PCT/JP2012/006324
Publication Date:
April 11, 2013
Filing Date:
October 03, 2012
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
B23K26/00; B23K26/064; B23K26/082; B23K26/12; B23K26/36; B23K26/382; B23K26/40; B41J2/05; B41J2/16; B81C1/00
Foreign References:
| JP2009061667A | 2009-03-26 | |||
| JP2011086654A | 2011-04-28 | |||
| JP2003205383A | 2003-07-22 |
Attorney, Agent or Firm:
ABE, Takuma et al. (30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, JP)
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