METHOD OF MANUFACTURING AN ELECTRONIC DEVICE - KONINKL PHILIPS ELECTRONICS NV

Title:

METHOD OF MANUFACTURING AN ELECTRONIC DEVICE

Document Type and Number:

WIPO Patent Application WO2004102279

Kind Code:

A3

Abstract:

A method of manufacturing an electronic device is provided wherein an interconnect is made using 193 nm lithography. No deformation of the desired linewidth takes place in that during a plasma gas is used which dissociates in low-weight ions. The electronic device is particularly an integrated circuit.

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Inventors:

FURUKAWA YUKIKO (BE)
WOLTERS ROBERTUS A M (NL)

Application Number:

PCT/IB2004/050664

Publication Date:

January 20, 2005

Filing Date:

May 12, 2004

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Assignee:

KONINKL PHILIPS ELECTRONICS NV (NL)
FURUKAWA YUKIKO (BE)
WOLTERS ROBERTUS A M (NL)

International Classes:

G03F7/36; G03F7/40; H01L21/311; H01L21/768; (IPC1-7): G03F7/40; H01L21/768

Foreign References:

US6183940B1	2001-02-06
US6103457A	2000-08-15

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