METHOD FOR MEASURING LINEAR DIMENSIONS

WIPO Patent Application WO/1998/040696

A1

The disclosed method for measuring linear dimensions using a scanning electron microscope consists in forming an electron beam and using it to scan the object being measured along a line. The values of the video signal at points of the scanning line are then measured for the ascending and descending profiles of the video signal that correspond to the edges of the object being measured. The positions of the invariant points are then determined on the ascending and descending profiles of the video signal. The size of the object is measured according to the distance between the invariant points, taking into account the magnification of the scanning electron microscope. The measured video signal is transposed by means of averaged approximation, while the positions of the invariant points are determined by recording the points of intersection of a curve, obtained as a result of the averaged approximation, with the ascending and descending profiles of the measured video signal.

ILIIN MIKHAIL JULIEVICH (RU)
KOZLITIN ALEXEI IVANOVICH (RU)
MAXIMOV SERGEI KIRILLOVICH (RU)
NIKITIN ARKADY VIKTOROVICH (RU)

PCT/RU1997/000060

September 17, 1998

March 12, 1997

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ILIIN MIKHAIL JULIEVICH (RU)
KOZLITIN ALEXEI IVANOVICH (RU)
MAXIMOV SERGEI KIRILLOVICH (RU)
NIKITIN ARKADY VIKTOROVICH (RU)

G01B15/00; (IPC1-7): G01B15/00; H01J37/28

SU112605A1	1957-11-30
DE3404611A1	1984-09-20
DE3228813A1	1983-05-26
EP0110301A2	1984-06-13
GB2170596A	1986-08-06
GB2002900A	1979-02-28

Patent, Law Firm 'JUS' (Moscow, 9, RU)

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