Title:
METHOD FOR PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/016331
Kind Code:
A1
Abstract:
Disclosed is a method for producing a device, which comprises: an application step wherein a precursor material, which is soluble in a solvent when applied and can be converted into a device-constituting material after application, is applied over a donor substrate; a conversion step wherein the precursor material is converted into a device-constituting material; and a transfer step wherein the material on the donor substrate is transferred to a device substrate. By this method, there can be obtained a device suited to size increase, which has characteristics equivalent to those of a device produced by vapor deposition.
Inventors:
SHIRASAWA NOBUHIKO (JP)
FUJIMORI SHIGEO (JP)
FUJIMORI SHIGEO (JP)
Application Number:
PCT/JP2009/060825
Publication Date:
February 11, 2010
Filing Date:
June 15, 2009
Export Citation:
Assignee:
TORAY INDUSTRIES (JP)
SHIRASAWA NOBUHIKO (JP)
FUJIMORI SHIGEO (JP)
SHIRASAWA NOBUHIKO (JP)
FUJIMORI SHIGEO (JP)
International Classes:
H05B33/10; H01L21/02; H01L21/336; H01L21/363; H01L27/12; H01L29/786; H01L51/05; H01L51/40; H01L51/50
Domestic Patent References:
| WO2007097178A1 | 2007-08-30 |
Foreign References:
| JP2006352143A | 2006-12-28 | |||
| JP2003304014A | 2003-10-24 | |||
| JP2005232136A | 2005-09-02 | |||
| JP2004266157A | 2004-09-24 | |||
| JP2008135198A | 2008-06-12 | |||
| JP3196230B2 | 2001-08-06 | |||
| JP2002008867A | 2002-01-11 | |||
| JP2008159778A | 2008-07-10 | |||
| JP2004015007A | 2004-01-15 | |||
| JP2004055686A | 2004-02-19 | |||
| JP2005166744A | 2005-06-23 | |||
| JP2008135622A | 2008-06-12 | |||
| JP3712760B2 | 2005-11-02 | |||
| JPH11214154A | 1999-08-06 | |||
| JP2006173444A | 2006-06-29 |
Other References:
APPLIED PHYSICS LETTERS, vol. 51, no. 12, 1987, pages 913 - 915
CHEMISTRY OF MATERIALS, vol. 16, no. 23, 2004, pages 4824 - 4840
CHEMICAL REVIEW, vol. 107, no. 4, 2007, pages 1233 - 1271
2007 SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS, pages 1834 - 1837
CHEMISTRY OF MATERIALS, vol. 16, no. 23, 2004, pages 4413 - 4422
CHEMICAL REVIEW, vol. 107, no. 4, 2007, pages 1066 - 1096
TETRAHEDRON LETTERS, vol. 46, 2005, pages 1981 - 1983
See also references of EP 2309823A4
CHEMISTRY OF MATERIALS, vol. 16, no. 23, 2004, pages 4824 - 4840
CHEMICAL REVIEW, vol. 107, no. 4, 2007, pages 1233 - 1271
2007 SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS, pages 1834 - 1837
CHEMISTRY OF MATERIALS, vol. 16, no. 23, 2004, pages 4413 - 4422
CHEMICAL REVIEW, vol. 107, no. 4, 2007, pages 1066 - 1096
TETRAHEDRON LETTERS, vol. 46, 2005, pages 1981 - 1983
See also references of EP 2309823A4
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