Title:
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE AND A MICROMECHANICAL DEVICE
Document Type and Number:
WIPO Patent Application WO2004071941
Kind Code:
A3
Abstract:
The invention relates to a method for producing a micromechanical device and to corresponding micromechanical device consisting of a substrate material (10), a membrane (20) and a hollow space (30) formed in the region of membrane (21) between said substrate and membrane. According to said invention holes (40) are embodied first and foremost in the membrane (20) during a first etching stage and afterwards, the hollow space is produced during a second etching stage.
Inventors:
METZGER LARS (DE)
FISCHER FRANK (DE)
FISCHER FRANK (DE)
Application Number:
PCT/DE2003/003194
Publication Date:
December 23, 2004
Filing Date:
September 25, 2003
Export Citation:
Assignee:
BOSCH GMBH ROBERT (DE)
METZGER LARS (DE)
FISCHER FRANK (DE)
METZGER LARS (DE)
FISCHER FRANK (DE)
International Classes:
B81B3/00; (IPC1-7): B81B3/00
Foreign References:
| US6359276B1 | 2002-03-19 | |||
| DE19752208A1 | 1999-06-02 | |||
| EP1130631A1 | 2001-09-05 | |||
| EP1254717A1 | 2002-11-06 | |||
| FR2817050A1 | 2002-05-24 |
Other References:
SARRO P M: "Silicon carbide as a new MEMS technology", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 82, no. 1-3, May 2000 (2000-05-01), pages 210 - 218, XP004198264, ISSN: 0924-4247
Download PDF:
Previous Patent: METHODS AND SYSTEMS FOR CONTROLLING MOVEMENT WITHIN MEMS STRUCTURES
Next Patent: ELECTRONIC DEVICE AND ITS MANUFACTURING METHOD DEVICE
Next Patent: ELECTRONIC DEVICE AND ITS MANUFACTURING METHOD DEVICE