Title:
METHODS AND SYSTEMS FOR CONTROLLING MOVEMENT WITHIN MEMS STRUCTURES
Document Type and Number:
WIPO Patent Application WO2004071940
Kind Code:
A3
Abstract:
A method for reducing undesired movements of proof masses (12) in micro-electromechanical systems (MEMS) devices (10) is described where the proof masses are suspended above a substrate by one or more suspensions (14). The method includes providing an anchor (62) on the substrate substantially between a first proof and suspensions for the first proof mass and a second proof mass and suspensions for the second proof mass, coupling a first portion (66) of a beam (64) to the first proof mass, coupling a second portion (68) of the beam to the second proof mass, and attaching a third portion (70) of the beam to the anchor, the third portion extending between the first portion and second portion of the beam, the anchor and the third portion configured to allow for rotation about an axis perpendicular to the substrate.
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Inventors:
PLATT WILLIAM P
BURGRSS JOHNSON R
BURGRSS JOHNSON R
Application Number:
PCT/US2004/003734
Publication Date:
September 30, 2004
Filing Date:
February 09, 2004
Export Citation:
Assignee:
HONEYWELL INT INC (US)
International Classes:
G01C19/5719; (IPC1-7): G01C19/56
Domestic Patent References:
| WO1995034798A1 | 1995-12-21 | |||
| WO2001022094A2 | 2001-03-29 |
Foreign References:
| US5780739A | 1998-07-14 | |||
| US5728936A | 1998-03-17 | |||
| US6282955B1 | 2001-09-04 |
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