Title:
MONITORING SYSTEM FOR A CONVEYING DEVICE THAT CONVEYS FLAT ARTICLES, ESPECIALLY WAFERS
Document Type and Number:
WIPO Patent Application WO2001040884
Kind Code:
A3
Abstract:
The invention relates to a monitoring system for a conveying device that conveys flat articles, especially wafers. Said conveying device comprises a carriage (28) which can be displaced along a predetermined path next to a flat article (10) that is located at a predetermined removal location and which is provided with an accommodating device for accommodating the flat article (10). Said monitoring system contains a light source (50) with a light emitting aperture and a contains a light receiver (52) with a light admitting aperture. The light emitting aperture and the light admitting aperture are positioned in such a manner that a light beam (60) which is directed from the light emitting aperture to the light admitting aperture is at least partially covered by the carriage (28) during the movement thereof through the light beam. In addition, an evaluating device is provided which is connected to the light receiver. Said evaluating device compares a specified signal, which is derived from the movement of the carriage along a specified path, with an actual signal, which is derived from an actual movement of the carriage, and indicates a possible variance between the two signals.
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Inventors:
LEITNER HANS (AT)
KOLLMER XAVER (DE)
SCHINDLER GUENTHER (DE)
FRISCH ERNST GEORG (DE)
KOLLMER XAVER (DE)
SCHINDLER GUENTHER (DE)
FRISCH ERNST GEORG (DE)
Application Number:
PCT/EP2000/012103
Publication Date:
February 14, 2002
Filing Date:
December 01, 2000
Export Citation:
Assignee:
LOGITEX REINSTMEDIENTECHNIK GM (DE)
LEITNER HANS (AT)
KOLLMER XAVER (DE)
SCHINDLER GUENTHER (DE)
FRISCH ERNST GEORG (DE)
LEITNER HANS (AT)
KOLLMER XAVER (DE)
SCHINDLER GUENTHER (DE)
FRISCH ERNST GEORG (DE)
International Classes:
B65G49/07; G05B19/404; H01L21/00; H01L21/677; (IPC1-7): H01L21/00
Foreign References:
| US4803373A | 1989-02-07 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 12 29 October 1999 (1999-10-29)
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11 30 September 1999 (1999-09-30)
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 06 30 April 1998 (1998-04-30)
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11 30 September 1999 (1999-09-30)
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 06 30 April 1998 (1998-04-30)
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