Title:
PLASMA GENERATING DEVICE AND PLASMA GENERATING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/032172
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a method and a device for securely and easily generating
plasma in a thin tube with a small tube diameter. [MEANS FOR SOLVING THE PROBLEMS]
A first electrode (30) formed of a conductive member covered with an insulator
or a dielectric is inserted into the thin tube (10). The thin tube (10) is placed
on a second electrode (20), and an AC voltage or a pulse voltage is applied across
the first electrode (30) and the second electrode (20) by a power source (40).
As a result, the plasma occurs around the first electrode (30) in the thin tube
(10).
Inventors:
SATO TAKEHIKO (JP)
NAKATANI TATSUYUKI (JP)
KIMURA TATSUO (JP)
NAKATANI TATSUYUKI (JP)
KIMURA TATSUO (JP)
Application Number:
PCT/JP2006/315958
Publication Date:
March 22, 2007
Filing Date:
August 11, 2006
Export Citation:
Assignee:
UNIV TOHOKU (JP)
TOYO ADVANCED TECH CO (JP)
SATO TAKEHIKO (JP)
NAKATANI TATSUYUKI (JP)
KIMURA TATSUO (JP)
TOYO ADVANCED TECH CO (JP)
SATO TAKEHIKO (JP)
NAKATANI TATSUYUKI (JP)
KIMURA TATSUO (JP)
International Classes:
H05H1/24; A61L2/14; B01J19/08
Foreign References:
| JP2004527073A | 2004-09-02 | |||
| JP2003135571A | 2003-05-13 | |||
| JP2004285187A | 2004-10-14 |
Other References:
See also references of EP 1933605A4
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (5-7 Hommachi 2-chome, Chuo-ku, Osaka-sh, Osaka 53, JP)
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