Title:
PLASMA GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/056185
Kind Code:
A1
Abstract:
In an atmospheric-pressure plasma generating device 10 of the present invention, a plasma gas jetting device 12, which brings a processing gas into a plasma state in a reaction chamber, and which jets the plasma gas thus brought into the plasma state, and a heating gas supply device 14 are disposed to face each other, said heating gas supply device jetting a heating gas to the plasma jetted from the plasma gas jetting device 12. A heat blocking cover 100 is disposed between the plasma gas jetting device 12 and the heating gas supply device 14 in a state of having a clearance 108 between the plasma gas jetting device 12 and the heat blocking cover. Consequently, heat transfer from the heating gas supply device 14 to the plasma gas jetting device 12 can be effectively eliminated by means of the heat blocking cover and the clearance.
Inventors:
IKEDO TOSHIYUKI (JP)
JINDO TAKAHIRO (JP)
NIWA TOMOKO (JP)
JINDO TAKAHIRO (JP)
NIWA TOMOKO (JP)
Application Number:
PCT/JP2015/077497
Publication Date:
April 06, 2017
Filing Date:
September 29, 2015
Export Citation:
Assignee:
FUJI MACHINE MFG (JP)
International Classes:
H05H1/26; H05H1/24
Domestic Patent References:
| WO2014184910A1 | 2014-11-20 |
Foreign References:
| JP2009524527A | 2009-07-02 | |||
| JPH03192697A | 1991-08-22 | |||
| JP2008255405A | 2008-10-23 |
Attorney, Agent or Firm:
NEXT INTERNATIONAL et al. (JP)
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