PROBE DEVICE WITH OPTICAL LENGTH-MEASURING DEVICE AND METHOD OF INSPECTING PROBE

Title:

PROBE DEVICE WITH OPTICAL LENGTH-MEASURING DEVICE AND METHOD OF INSPECTING PROBE

Document Type and Number:

WIPO Patent Application WO/2004/066378

Kind Code:

A1

Abstract:

A probe device (100) with control position- measuring means, for inspecting electrical characteristics of an object to be inspected formed on a wafer-like substrate (W). The probe device has a prober chamber (29), a placement base (6) that is provided in the prober chamber and on which the object to be inspected is placed, a movement mechanism (16) for moving the placement base in X, Y, Z, and Ѳ directions, and probes (26). The probe device further has a probe card (14) provided opposite the placement base and first optical length-measuring devices (4a, 4b). The first optical length-measuring devices radiate light to a surface of the object to be inspected placed on the placement base and measure the position in the Z-axis direction of the object based on the light reflected from the object. The probe device can also have second optical length-measuring devices (5a, 5b).

Inventors:

KOMATSU SHIGEKAZU (JP)
HYAKUDOMI TAKANORI (JP)
CHAYA HIROMI (JP)
HAYASHI TAKAHISA (JP)
SHIGENO YUKIHIDE (JP)

Application Number:

PCT/JP2004/000309

Publication Date:

August 05, 2004

Filing Date:

January 16, 2004

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
KOMATSU SHIGEKAZU (JP)
HYAKUDOMI TAKANORI (JP)
CHAYA HIROMI (JP)
HAYASHI TAKAHISA (JP)
SHIGENO YUKIHIDE (JP)

International Classes:

G01R31/28; G01R1/06; H01L21/66; (IPC1-7): H01L21/66

Domestic Patent References:

WO2002075807A1

2002-09-26

Foreign References:

JPH11271360A	1999-10-08
US5642056A	1997-06-24
JPH08124978A	1996-05-17

Other References: