Title:
PRODUCTION METHOD FOR ZINC OXIDE THIN FILM, AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/031782
Kind Code:
A1
Abstract:
A production method for a zinc oxide thin film, having a step in which a basic solution of at least pH10 and containing a tetrahydroxozincate (II) ion is prepared, a step in which the basic solution is coated on a substrate, and a step in which the basic solution is heated.
Inventors:
NISHI YASUTAKA (JP)
NAKAZUMI MAKOTO (JP)
TAKI YUSUKE (JP)
NAKAZUMI MAKOTO (JP)
TAKI YUSUKE (JP)
Application Number:
PCT/JP2012/071732
Publication Date:
March 07, 2013
Filing Date:
August 28, 2012
Export Citation:
Assignee:
NIKON CORP (JP)
NISHI YASUTAKA (JP)
NAKAZUMI MAKOTO (JP)
TAKI YUSUKE (JP)
NISHI YASUTAKA (JP)
NAKAZUMI MAKOTO (JP)
TAKI YUSUKE (JP)
International Classes:
C01G9/02
Foreign References:
| JP2004149367A | 2004-05-27 | |||
| JP2007070188A | 2007-03-22 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
Download PDF:
Claims: