Title:
SCANNING PROBE MICROSCOPE AND CONTROL METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2013/054715
Kind Code:
A1
Abstract:
A scanning probe microscope comprises a cantilever (12) having a probe (11) at a free end, a displacement detection unit (15) for outputting the displacement signal of the cantilever (12), a vibration excitation unit (14) for vibrating the cantilever (12), and a scanning unit (20) for three-dimensionally and relatively moving a sample (19) and the probe (11). A mixed signal generation unit (30) comprises an amplitude information detection unit (31) for supplying a vibration excitation signal to the vibration excitation unit (14) and generating an amplitude signal including information relating to the amplitude of the displacement signal, and a phase difference information detection unit (32) for generating a phase signal including information relating to the phase difference between the displacement signal and the vibration excitation signal, and adds the amplitude signal and the phase signal to generate a mixed signal. A controller (25) for controlling the scanning unit (20) includes a Z control unit (26), and the Z control unit (26) controls the distance between the sample (19) and the probe (11) on the basis of the mixed signal.
Inventors:
SAKAI NOBUAKI (JP)
Application Number:
PCT/JP2012/075688
Publication Date:
April 18, 2013
Filing Date:
October 03, 2012
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G01Q60/32
Domestic Patent References:
| WO2010023811A1 | 2010-03-04 |
Foreign References:
| US6038916A | 2000-03-21 | |||
| US20090139315A1 | 2009-06-04 | |||
| JP2010512518A | 2010-04-22 | |||
| JP2008232984A | 2008-10-02 |
Other References:
See also references of EP 2767837A4
Attorney, Agent or Firm:
KURATA, Masatoshi et al. (JP)
Masatoshi Kurata (JP)
Masatoshi Kurata (JP)
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Claims: