SHAPE MEASURING DEVICE USING FREQUENCY SCANNING INTERFEROMETER

Title:

SHAPE MEASURING DEVICE USING FREQUENCY SCANNING INTERFEROMETER

Document Type and Number:

WIPO Patent Application WO/2014/189252

Kind Code:

A1

Abstract:

A shape measuring device comprises a light source unit, light splitting unit, reference mirror, light receiving unit and processing unit. The light source unit produces light and can change the wavelength of the light. The light splitting unit splits the light produced from the light source unit into at least reference light and measurement light. The reference mirror reflects the reference light. The light receiving unit receives reference light that has been reflected in such a way as to form a reference light pathway by means of the reference mirror, and measurement light that has been reflected in such a way as to form a measurement light pathway by means of a light-permeable object to be measured formed on a substrate. The processing unit computes the shape of the object to be measured on the basis of changes in interference resulting from changes in the wavelength of light between the reference light and the measurement light received by the light receiving unit, and computes the absolute height of a first area of the object to be measured and the relative height of a second area with respect to the first area of the object to be measured, and matches the absolute height of the first area and the relative height of the second area so as to compute the shape of the object to be measured. Consequently, the shape of the object to be measured can be effectively measured.

Inventors:

SER JANG-IL (KR)
KIM HONG-KI (KR)

Application Number:

PCT/KR2014/004490

Publication Date:

November 27, 2014

Filing Date:

May 20, 2014

Export Citation:

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Assignee:

KOH YOUNG TECH INC (KR)

International Classes:

G01B11/24; G01B9/02

Foreign References:

JP2003534540A	2003-11-18
JP2011107139A	2011-06-02
KR20130015893A	2013-02-14
JPH08159710A	1996-06-21
KR20100092058A	2010-08-19

Other References: