Title:
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/054182
Kind Code:
A1
Abstract:
Each of a first and a second inversion unit (41a, 41b) is provided with a delivery slot, a loading slot, and an inversion mechanism. The inversion mechanism inverts the delivery slot and the loading slot integrally to switch between a delivery attitude in which the delivery slot is disposed on the lower side and a loading attitude in which the loading slot is disposed on the lower side. An indexer robot (3) inserts an unprocessed substrate (9) into the delivery slot of the first or the second inversion unit in the delivery attitude, and a center robot (5) inserts a processed substrate into the loading slot of the first or the second inversion unit in the loading attitude. In this way, contamination of the processed substrate is suppressed. In a high operating state, the first or the second inversion unit which has no substrate inserted into the delivery slot and the loading slot thereof and which is in the loading attitude is placed in the delivery attitude, and an unprocessed substrate is inserted into the delivery slot of the inversion unit. In this way, a plurality of substrates are processed efficiently.
Inventors:
YAMAMOTO SHINJI (JP)
Application Number:
PCT/JP2019/025957
Publication Date:
March 19, 2020
Filing Date:
June 28, 2019
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/677; H01L21/304
Foreign References:
| JP2012023195A | 2012-02-02 | |||
| JP2015122477A | 2015-07-02 | |||
| JP2009252888A | 2009-10-29 |
Attorney, Agent or Firm:
MATSUSAKA, Masahiro et al. (JP)
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