Title:
SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE SUPPORTING MEMBER, SUBSTRATE TRANSFER APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/049133
Kind Code:
A1
Abstract:
Disclosed is a substrate supporting apparatus (T) which supports a substrate (P). The substrate supporting apparatus is provided with: a placing section (20) having the substrate placed thereon; and at least one supporting section (TM), which protrudes from the placing section, and supports a part of the substrate placed on the placing section. The supporting section has: a base section (22) fixed to the placing section; and an abutting section (23), which is provided such that the abutting section can move to and from the base section, and which abuts on the substrate placed on the placing section.
Inventors:
KAWAE KUNIHIRO (JP)
SEKI TADASHI (JP)
YOKOTA MUNEYASU (JP)
KOGURE KIYOSHI (JP)
SEKI TADASHI (JP)
YOKOTA MUNEYASU (JP)
KOGURE KIYOSHI (JP)
Application Number:
PCT/JP2010/068499
Publication Date:
April 28, 2011
Filing Date:
October 20, 2010
Export Citation:
Assignee:
NIKON CORP (JP)
KAWAE KUNIHIRO (JP)
SEKI TADASHI (JP)
YOKOTA MUNEYASU (JP)
KOGURE KIYOSHI (JP)
KAWAE KUNIHIRO (JP)
SEKI TADASHI (JP)
YOKOTA MUNEYASU (JP)
KOGURE KIYOSHI (JP)
International Classes:
H01L21/673; G03F7/20; H01L21/027; H01L21/677
Foreign References:
| JP2003149361A | 2003-05-21 | |||
| JP2004273702A | 2004-09-30 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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