Title:
SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER AND ITS PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO2005059972
Kind Code:
A3
Abstract:
A synthetic quartz glass for an optical member which is free from compaction and rarefaction is obtained. A synthetic quartz glass for an optical member to be used for an optical device employing a light having a wavelength of at most 400 nm and at least 170 nm as a light source, which contains substantially no oxygen excess defects, dissolved oxygen molecules nor reduction type defects, which has a chlorine concentration of at most 50 ppm and a OH group concentration of at most 100 ppm, and which contains oxygen deficient defects within a concentration range of at most 5x10(14) defects/cm(3) and at least 1x10(13) defects/cm(3). The fluorine concentration is preferably at most 100 ppm. A process for producing the synthetic quartz glass is also claimed.
Inventors:
IKUTA YOSHIAKI (JP)
AGATA NORIYUKI (JP)
AGATA NORIYUKI (JP)
Application Number:
PCT/JP2004/019443
Publication Date:
August 04, 2005
Filing Date:
December 17, 2004
Export Citation:
Assignee:
ASAHI GLASS CO LTD (JP)
IKUTA YOSHIAKI (JP)
AGATA NORIYUKI (JP)
IKUTA YOSHIAKI (JP)
AGATA NORIYUKI (JP)
International Classes:
G02B1/00; C03B8/04; C03B19/14; C03B20/00; C03C3/06; C03C4/00; (IPC1-7): C03C3/06; C03B19/14; C03B32/00; C03C4/00
Domestic Patent References:
| WO2003080526A1 | 2003-10-02 |
Foreign References:
| EP1130000A1 | 2001-09-05 | |||
| EP1103528A2 | 2001-05-30 | |||
| US6550277B1 | 2003-04-22 | |||
| EP1084995A1 | 2001-03-21 | |||
| EP1112973A2 | 2001-07-04 | |||
| US20030115904A1 | 2003-06-26 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 07 31 July 1996 (1996-07-31)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 01 30 January 1998 (1998-01-30)
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 05 3 May 2002 (2002-05-03)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 01 30 January 1998 (1998-01-30)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 01 30 January 1998 (1998-01-30)
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 05 3 May 2002 (2002-05-03)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 01 30 January 1998 (1998-01-30)
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