Title:
TREATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/004228
Kind Code:
A1
Abstract:
A device for treating an object to be treated is characterized by having a separation wall, an opening portion, a door mechanism, a lid body opening/closing mechanism, drive means, a cover member, and a gas-discharging mechanism. The separation wall partitions a space into an external space region where a receiving container with a lid body, for air-tightly receiving an object to be treated, is transported and an internal space region where the object to be treated taken out from the receiving container is transported. The opening portion is provided in the partition wall and allows the two space regions to communicate with each other. The door mechanism is capable of closing the opening portion. The lid body opening/closing mechanism is provided in the door mechanism and capable of opening/closing the lid body of a treating container placed in a predetermined position in the external space region with the door mechanism closing the opening portion. The drive means moves the lid body opening/closing mechanism, relative to the door mechanism, in the direction of leaving and approaching the treating container. The cover member partitions out, in the door mechanism, a space to have a drive means placement room for receiving the drive means, and a gas-discharging mechanism for discharging gas in the drive means-disposing room.
Inventors:
OYAMA KATSUHIKO (JP)
MOCHIDUKI SHINYA (JP)
TAKEUCHI YASUSHI (JP)
MOCHIDUKI SHINYA (JP)
TAKEUCHI YASUSHI (JP)
Application Number:
PCT/JP2004/009152
Publication Date:
January 13, 2005
Filing Date:
June 29, 2004
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
OYAMA KATSUHIKO (JP)
MOCHIDUKI SHINYA (JP)
TAKEUCHI YASUSHI (JP)
OYAMA KATSUHIKO (JP)
MOCHIDUKI SHINYA (JP)
TAKEUCHI YASUSHI (JP)
International Classes:
B65G49/07; H01L21/677; B65G49/00; (IPC1-7): H01L21/68; B65G49/00
Foreign References:
| JP2000150613A | 2000-05-30 | |||
| JPH05275512A | 1993-10-22 | |||
| JPH08293534A | 1996-11-05 | |||
| JP2002170860A | 2002-06-14 | |||
| JPH04308123A | 1992-10-30 |
Attorney, Agent or Firm:
Yoshitake, Kenji (Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, JP)
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