Title:
USE METHOD AND DETECTION SYSTEM FOR PHOTORESIST MATERIAL
Document Type and Number:
WIPO Patent Application WO/2022/166489
Kind Code:
A1
Abstract:
A use method and detection system (1) for a photoresist material. The use method for a photoresist material comprises the steps of: when a photoresist material unfreezing instruction has been received, sending a photoresist material into an unfreezing chamber (20), and the photoresist material entering an unfrozen state (B); when a machine loading instruction has been received, sending the photoresist material to a machine table (30) (C); when the machine table (30) has received the photoresist material, testing the photoresist material, and if the photoresist material is tested to be acceptable, sending the photoresist material onto the machine table (30), and the photoresist material entering a machine loading state (D); and when a preset situation is detected, detecting material information of the photoresist material, and sending the photoresist material back to the unfreezing chamber (20) or a treatment chamber according to the material information (E).
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Inventors:
PAN PO-SUNG (CN)
YUAN HAIJIANG (CN)
YUAN HAIJIANG (CN)
Application Number:
PCT/CN2021/142899
Publication Date:
August 11, 2022
Filing Date:
December 30, 2021
Export Citation:
Assignee:
HKC CORP LTD (CN)
International Classes:
G03F7/20; B65G47/74
Foreign References:
| CN112965339A | 2021-06-15 | |||
| CN210015326U | 2020-02-04 | |||
| CN102005072A | 2011-04-06 | |||
| JP2009064726A | 2009-03-26 | |||
| KR101837508B1 | 2018-03-13 | |||
| CN105352629A | 2016-02-24 | |||
| CN110429042A | 2019-11-08 | |||
| CN201997441U | 2011-10-05 |
Attorney, Agent or Firm:
SHENZHEN BAIRUI PATENT&TRADEMARK OFFICE (CN)
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