Title:
WORK RECEIVING DEVICE AND WORK RECEIVING METHOD
Document Type and Number:
WIPO Patent Application WO/2006/137407
Kind Code:
A1
Abstract:
A substrate receiving device (1) for receiving substrates (W) as workpieces. The substrate receiving device (1) has a first substrate cassette (10) for receiving substrates (W) from above in the order of loading, an unloading conveyor (3) for sequentially unloading the substrates (W) from the one at the lowermost position, and a second substrate cassette (20) for sequentially receiving from above the substrates (W) conveyed by the unloading conveyor (3). When the substrates (W) are transferred from the first substrate cassette (10) to the second substrate cassette (20), the order of placement is reversed. Consequently, when the substrates (W) are unloaded from the second substrate cassette (20), the substrate (W) having been loaded first is unloaded first.
Inventors:
KITAZAWA YASUYOSHI (JP)
Application Number:
PCT/JP2006/312341
Publication Date:
December 28, 2006
Filing Date:
June 20, 2006
Export Citation:
Assignee:
SHINKO ELECTRIC CO LTD (JP)
KITAZAWA YASUYOSHI (JP)
KITAZAWA YASUYOSHI (JP)
International Classes:
B65G49/06; H01L21/677
Foreign References:
| JPH02207547A | 1990-08-17 | |||
| JP2004207279A | 2004-07-22 |
Attorney, Agent or Firm:
Shiga, Masatake (Yaesu Chuo-k, Tokyo 53, JP)
Download PDF:
Previous Patent: PLASTIC SLIDING MEMBER, SLEDGE FOR CONVEYING HEAVY OBJECT, AND METHOD OF CONVEYING HEAVY OBJECT
Next Patent: ELECTRO-OPTICAL ELEMENT
Next Patent: ELECTRO-OPTICAL ELEMENT