Title:
複数領域処理システム及びヘッド
Document Type and Number:
Japanese Patent JP2010538168
Kind Code:
A
Abstract:
The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.
Inventors:
End, Rick
Winer cart
De, Intranil
Tun, james
Chao, Mao Shen
Winer cart
De, Intranil
Tun, james
Chao, Mao Shen
Application Number:
JP2010524156A
Publication Date:
December 09, 2010
Filing Date:
September 05, 2008
Export Citation:
Assignee:
INTERMOLECULAR,INC.
International Classes:
C23C16/04; C23C16/455
Domestic Patent References:
| JP2004152702A | 2004-05-27 | |||
| JPH0747201A | 1995-02-21 | |||
| JPH07201752A | 1995-08-04 | |||
| JP2006140439A | 2006-06-01 | |||
| JPH1150237A | 1999-02-23 | |||
| JP2006310813A | 2006-11-09 | |||
| JP2004152702A | 2004-05-27 | |||
| JPH0747201A | 1995-02-21 | |||
| JPH07201752A | 1995-08-04 |
Foreign References:
| WO2002061172A1 | 2002-08-08 | |||
| WO2007061633A2 | 2007-05-31 |
Attorney, Agent or Firm:
Mieko Kashihara
Goichi Takahashi
Masahito Shibata
Goichi Takahashi
Masahito Shibata