Title:
OPTICAL WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2019161070
Kind Code:
A
Abstract:
To provide an optical waveguide structure of which a heating efficiency is high and deterioration of reliability is suppressed.SOLUTION: An optical waveguide structure comprises: a distribution reflection part; a clad part; a heater along the distribution reflection part; and a wiring connected to the heater. First and second grooves extended to each side of left and right of the distribution reflection part define a mesa part containing the distribution reflection part, and the heater is arranged on the mesa part. The first and second grooves include a first part and a second part of which a groove width and a groove depth are smaller than the first part. In the first and second grooves, the clad part near from them includes a convex part projected in each groove and forming the second part, and the wiring is hanged to the second part through an upper side of the convex part. Just under the mesa part and the first and second grooves, a gap expanded in flat is formed between the substrates. The first part reaches the gap, and the second part does not reach the gap. There is a bottom surface formed by one part of the clad part, and the mesa part and the convex part are connected by one part of the clad part forming the bottom surface.SELECTED DRAWING: Figure 2
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Inventors:
KAWAKITA YASUMASA
HIGA YASUTAKA
HIGA YASUTAKA
Application Number:
JP2018047203A
Publication Date:
September 19, 2019
Filing Date:
March 14, 2018
Export Citation:
Assignee:
FURUKAWA ELECTRIC CO LTD
International Classes:
H01S5/026; H01S5/125
Domestic Patent References:
| JP2012174938A | 2012-09-10 | |||
| JP2017163081A | 2017-09-14 | |||
| JP2017502355A | 2017-01-19 | |||
| JP2014017481A | 2014-01-30 | |||
| JP2007025583A | 2007-02-01 | |||
| JP2007294914A | 2007-11-08 | |||
| JP2016054168A | 2016-04-14 | |||
| JP2015012176A | 2015-01-19 |
Foreign References:
| US20140321488A1 | 2014-10-30 |
Attorney, Agent or Firm:
Sakai International Patent Office