Title:
VACUUM APPARATUS
Document Type and Number:
Japanese Patent JP2019212465
Kind Code:
A
Abstract:
To provide a vacuum apparatus absorbing radiation energy by a vacuum pump, while preventing an increase in size of a vacuum chamber, and restraining an increase in apparatus cost.SOLUTION: A vacuum apparatus includes a bracket for absorbing radiation energy, generated by a vacuum pump, between the vacuum pump and a vacuum chamber. The bracket is formed of a material of high heat conductivity. Furthermore, a conductive membrane having high emissivity is formed at least on the inside surface, preferably on the entire surface including the inside and the outside. The bracket absorbs radiation energy, generated from the vacuum pump, by the membrane while reflecting several times on the inside surface, and releases radiation heat generated by the radiation energy to the outside. Radiation energy from the vacuum pump is absorbed by the bracket every time of multiple times of reflection and an energy amount is reduced, and thereby a temperature rise of the construct and a processing object, provided in the vacuum chamber, is restrained.SELECTED DRAWING: Figure 1
Inventors:
IDENO KEITA
NISHIYAMA TETSURO
SAITO HIROYASU
NISHIYAMA TETSURO
SAITO HIROYASU
Application Number:
JP2018107009A
Publication Date:
December 12, 2019
Filing Date:
June 04, 2018
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC
International Classes:
H01J37/18; F04B37/16; F04B39/06; F04B39/12; H01J37/305; H01L21/027
Domestic Patent References:
| JP2007142190A | 2007-06-07 | |||
| JP2001110346A | 2001-04-20 | |||
| JP2005191494A | 2005-07-14 | |||
| JP2008034740A | 2008-02-14 | |||
| JP2010129687A | 2010-06-10 | |||
| JP2017152276A | 2017-08-31 |
Foreign References:
| US3727026A | 1973-04-10 | |||
| US20070115444A1 | 2007-05-24 |
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken