Title:
【発明の名称】光電変換装置
Document Type and Number:
Japanese Patent JP2501199
Kind Code:
B2
Abstract:
PURPOSE:To manufacture a photoelectric conversion device, a manufacturing process of which is simplified, yield of which is improved and cost of which is reduced, by forming an insulating layer and a photoconductive semiconductor layer shaped onto the insulating layer to at least a photoelectric conversion section, a charge storage section and a switch section. CONSTITUTION:A lower layer electrode wiring 6 for a wiring section 2, a lower layer electrode wiring 7 for a charge storage section 4 and a lower layer electrode wiring 8 as a gate electrode for a switch section 5 are shaped onto a substrate 1, and an insulating layer 9 is formed onto these lower layer electrode wirings 6, 7, 8 and the substrate 1 among these wirings. An opening is bored to one parts of the insulating layer 9 on the wiring section 2 and a photoconductive semiconductor layer 10 for connection. Upper layer electrode wirings 12, 13, 14 are shaped onto the photoconductive semiconductor layer 10, and an opening section between an upper layer electrode wiring 12' and the upper layer electrode wiring 13 functions as a photoelectric conversion region in a photoelectric conversion section 3.
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Inventors:
HATANAKA KATSUNORI
SAIGA TOSHIHIRO
KANEKO TETSUYA
KITAHARA NOBUKO
SUZUKI HIDEYUKI
SAIGA TOSHIHIRO
KANEKO TETSUYA
KITAHARA NOBUKO
SUZUKI HIDEYUKI
Application Number:
JP14499086A
Publication Date:
May 29, 1996
Filing Date:
June 23, 1986
Export Citation:
Assignee:
CANON KK
International Classes:
H01L27/146; H04N5/335; H04N5/341; H04N5/357; H04N5/369; H04N5/374; (IPC1-7): H01L27/146
Domestic Patent References:
JP56138968A | ||||
JP605557A | ||||
JP59177964A | ||||
JP59138371A |
Attorney, Agent or Firm:
Yamashita