Title:
加速度センサ
Document Type and Number:
Japanese Patent JP3941694
Kind Code:
B2
Abstract:
First and second fixed electrodes provided on a substrate, a movable electrode which is provided above the first and second fixed electrodes facing against them, and is elastically supported on the substrate by a first elastic supporting body and is swingable, a mass which is elastically supported on the substrate by a second elastically supporting body and is movable in response to an acceleration in a direction perpendicular to the substrate, and a linking portion for linking the movable electrode and the mass at a position away from a swing axis of the movable electrode by a predetermined distance are provided. An acceleration is measured based on changes in a first capacitance provided by the first fixed electrode and the movable electrode and a second capacitance provided by the second fixed electrode and the movable electrode. Thus, a high impact resistant and highly reliable acceleration sensor can be obtained.
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Inventors:
Eiji Yoshikawa
Ban Masahiro
Nobuaki Konno
Ban Masahiro
Nobuaki Konno
Application Number:
JP2002589141A
Publication Date:
July 04, 2007
Filing Date:
November 19, 2001
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01P15/125; G01P15/18; G01P21/00; H01L29/84
Domestic Patent References:
| JP5133976A | ||||
| JP75193A | ||||
| JP9189716A |
Attorney, Agent or Firm:
Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka