Title:
半導体製品コンテナおよび半導体製品コンテナを処理する機器
Document Type and Number:
Japanese Patent JP4058340
Kind Code:
B2
Abstract:
Disclosed is an equipment for handling a semiconductor product container (2), the equipment comprising handling means (14) for transporting and positioning the container, wherein a loading/unloading position requires first support members forming part of a loading/unloading device engaging with second support members forming part of the container. According to the invention, the equipment comprises detection means (15) for detecting reference point positions of the container and localization means (16) for computing the position of the container from the detected reference point positions, and allows for handling the containers without the need of mounting any support pins on each storage location in prior art.
More Like This:
Inventors:
Cubird, Grego
Application Number:
JP2002553222A
Publication Date:
March 05, 2008
Filing Date:
October 12, 2001
Export Citation:
Assignee:
Qimonda Dresden Gezelshaft Mitt Beschlenktel Haftung Und Company Offene Handels Gesellshaft
International Classes:
B65D85/86; H01L21/673; H01L21/00; H01L21/68
Domestic Patent References:
| JP10050639A | ||||
| JP3104257A | ||||
| JP11212621A | ||||
| JP63229810A | ||||
| JP11221784A | ||||
| JP6307842A | ||||
| JP7003990U |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita