Title:
湿度センサ
Document Type and Number:
Japanese Patent JP4475070
Kind Code:
B2
Abstract:
A humidity sensor includes a substrate, a pair of electrodes disposed opposite to each other with a space on the same plane of the substrate, and a humidity sensitive layer disposed on the substrate to cover the pair of electrodes and the substrate between the pair of electrodes. The layer is made of a humidity sensitive material containing beads. Because the beads having approximately the same size are arranged partially in one layer, the thickness of the humidity sensitive layer can be made uniform using the diameter of the beads as standard.
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Inventors:
Kazuo Usui
Application Number:
JP2004270466A
Publication Date:
June 09, 2010
Filing Date:
September 16, 2004
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01N27/22
Domestic Patent References:
| JP2260504A | ||||
| JP61054176B2 | ||||
| JP54031597A | ||||
| JP54012893A | ||||
| JP5133921A | ||||
| JP2002071612A |
Attorney, Agent or Firm:
Kazuyuki Yahagi