Title:
静電気放電耐性特性の測定方法並びに静電気破壊試験方法及びこれらの方法を実現するパルス電圧印加回路
Document Type and Number:
Japanese Patent JP4630594
Kind Code:
B2
More Like This:
Inventors:
Kodama Noriyuki
Toshiyuki Nakaya
Toshiyuki Nakaya
Application Number:
JP2004216672A
Publication Date:
February 09, 2011
Filing Date:
July 26, 2004
Export Citation:
Assignee:
Hanwa Electronics Co., Ltd.
International Classes:
G01R31/30; H01L21/822; H01L27/04
Domestic Patent References:
| JP58100759A | ||||
| JP6140489A | ||||
| JP2000329818A |
Foreign References:
| US6429674 |
Attorney, Agent or Firm:
Naoto Akao