シート状物およびその製造方法

Title:

シート状物およびその製造方法

Document Type and Number:

Japanese Patent JP5029040

Kind Code:

B2

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Inventors:

Masato Masuda
Takashi Ochi

Application Number:

JP2007019736A

Publication Date:

September 19, 2012

Filing Date:

January 30, 2007

Export Citation:

Assignee:

TORAY INDUSTRIES,INC.

International Classes:

D04H1/4382; D06M11/00; D06M11/38

Domestic Patent References:

Previous Patent: JPS5029039

Next Patent: プラズマＣＶＤ装置、及び、薄膜製造方法