Title:
基板、膜形成基板の製造方法及び塗布装置
Document Type and Number:
Japanese Patent JP6602610
Kind Code:
B2
More Like This:
Inventors:
Katsuki Nishinaka
Shinji Kajiwara
Shinji Kajiwara
Application Number:
JP2015175722A
Publication Date:
November 06, 2019
Filing Date:
September 07, 2015
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
G02F1/1333; B05C5/00; B05D1/26; B05D7/00; G02F1/13
Domestic Patent References:
| JP2012133137A | ||||
| JP2007114586A | ||||
| JP2014061498A | ||||
| JP2007322627A |
Foreign References:
| US20130235310 | ||||
| CN102236208A | ||||
| WO2007129489A1 | ||||
| WO2015045581A1 | ||||
| WO2011129065A1 |
Attorney, Agent or Firm:
Kiuchi Mitsuharu