Title:
基板整列装置、基板処理装置、基板配列装置、基板整列方法、基板処理方法および基板配列方法
Document Type and Number:
Japanese Patent JP6685213
Kind Code:
B2
Abstract:
In a substrate alignment apparatus, a motor sequentially rotates a plurality of substrates in a circumferential direction, the substrates being to be held in a vertical posture at a lower edge portion by a substrate holder. A controller controls the motor on the basis of warpage-and-notch-position information and input information that is input about a warped state of the substrates, to determine circumferential positions of the notches of the substrates. This reduces a distance in a thickness direction between a lower edge portion and an upper edge of each substrate that is held by the substrate holder. As a result, it is possible to facilitate handling of a plurality of substrates held by the substrate holder.
Inventors:
Yuuki Miyamoto
Application Number:
JP2016190860A
Publication Date:
April 22, 2020
Filing Date:
September 29, 2016
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/68; H01L21/304; H01L21/677
Domestic Patent References:
| JP2007123592A | ||||
| JP2010093230A | ||||
| JP2010129811A | ||||
| JP2007067334A | ||||
| JP62149152A |
Foreign References:
| US20040026694 |
Attorney, Agent or Firm:
Masahiro Matsusaka
Tsutomu Tanaka
Masamichi Ida
Tsutomu Tanaka
Masamichi Ida