Document Type and Number:
Japanese Patent JPS50154070
Kind Code:
A
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Application Number:
JP6234974A
Publication Date:
December 11, 1975
Filing Date:
May 31, 1974
Export Citation:
International Classes:
H01L21/306; H01L21/308; H01L31/00; H01L31/04; H01L33/14; H01L33/30; (IPC1-7): H01L21/306; H01L31/00; H01L33/00