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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5780839
Kind Code:
U
Application Number:
JP15765680U
Publication Date:
May 19, 1982
Filing Date:
November 04, 1980
Export Citation:
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International Classes:
H01L21/52; H01L21/58; H01L21/60; H01L23/04; H01L23/48; (IPC1-7): H01L21/58; H01L21/60; H01L23/48