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Title:
【考案の名称】ピツト等の自動除染装置に於ける吸着盤
Document Type and Number:
Japanese Patent JPS5863600
Kind Code:
U
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Inventors:
Sugiyama Tomohide
Homma Seihachiro
Application Number:
JP15826881U
Publication Date:
April 28, 1983
Filing Date:
October 26, 1981
Export Citation:
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International Classes:
G21F9/28; B08B1/04; B08B5/00; B08B9/08; B08B9/087; G21F9/00; G21F9/30; (IPC1-7): G21F9/28; B08B1/04; B08B5/00



 
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