Title:
ABRASIVE CLOTH AND CMP DEVICE WITH THE SAME
Document Type and Number:
Japanese Patent JP2001219361
Kind Code:
A
Abstract:
To provide an abrasive cloth capable of increasing a slurry holding amount and executing the chemical grinding and the mechanical grinding in balance.
This abrasive cloth 13 has plural grooves 35 on its surface Regions 37 of high concentration of grooves and regions of low concentration of grooves 38 are alternately arranged on the surface of the abrasive cloth.
Inventors:
SUGIYAMA SHINICHI
Application Number:
JP2000026609A
Publication Date:
August 14, 2001
Filing Date:
February 03, 2000
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B24B37/20; B24B37/26; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
Attorney, Agent or Firm:
Kisaburo Suzuki (2 outside)