Title:
DEVICE AND METHOD FOR DEMOUNTING ABRASIVE PAD
Document Type and Number:
Japanese Patent JP2001219360
Kind Code:
A
Abstract:
To easily demount an abrasive pad from a platen and to improve the working efficiency.
This abrasive pad demounting device 1 comprises a gripper 4 for gripping one end of an abrasive pad, and a towing means 5 for applying the towing force toward a side radially opposite to the gripper 4 through the platen 2.
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Inventors:
TAOKA MEGUMI
OKAJIMA ATSUSHI
OKAJIMA ATSUSHI
Application Number:
JP2000028656A
Publication Date:
August 14, 2001
Filing Date:
February 07, 2000
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
B24B37/20; B24B37/24; (IPC1-7): B24B37/00
Attorney, Agent or Firm:
Yoshitaka Sonoda (1 outside)
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