To solve the problem that sensitivity to angular velocity can not be improved, since optimum points of a driving condition and detecting condition are different in a circuit wherein divided electrodes are arranged on one surface and the whole surface electrode is arranged on the other surface, and the electrodes are used in common as a driving electrode and a detecting electrode, in a case that a tuning bar vibrator of a cantilever beam type is used as an angular velocity sensor.
Two electrodes 6a, 6b which are divided in a width direction are arranged on a retaining member side of one surface of a piezoelectric element 1 wherein two piezoelectric substrates 2, 3 are stuck with each other and one end is fixed with a retaining member 20, an electrode 7 is arranged on a tip side, and the whole electrode 8 is arranged on a facing surface. A driving means 12 is connected with the electrode 7 in the tip part and the electrode 8, and a detecting means 13 and a synchronous detection means 14 are connected with the electrodes 6a, 6b.
| WO/2002/018875 | ANGULAR VELOCITY SENSOR |
| JP3332460 | Description: Angular Velocity Detection Method and Vibration Gyro |
| WO/2010/090949 | SEISMIC ACQUISITION SYSTEM AND TECHNIQUE |
KOIKE TAKAFUMI
YAMASHITA MITSUHIRO
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