To provide a black thin film having low reflectivity and a light shielding property, capable of being used as the black matrix in the color filter for LCD and formed from a nonchromium vaporization material incapable of generating metallic chromium waste or waste chromium soln. by a dry process and its production method.
This black thin film formed on a substrate is expressed by MaOb(1-x), where M is copper, chromium or iron atom, a=1, b=1 and 0≤x≤1 when M is copper, a=1, b=1 and 0≤x≤1 when M is chromium, and a=3, b=4 and 0≤x≤1 when M is iron. Further, the film has such a gradient composition that the index (x) is gradually increased from the substrate toward the surface in the film thickness direction until x=1 at the outermost surface, a clear interface does not exist between the MaOb(1-x) component regions and between the MaOb(1-x) component region and the M component region, and the MaOb(1-x) component and M component are intermixed in the composition.
TAKAI OSAMU
MATSUDA HIROSHI
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