Title:
CERAMIC HEATER FOR SEMICONDUCTOR MANUFACTURING/ INSPECTING EQUIPMENT
Document Type and Number:
Japanese Patent JP2002319525
Kind Code:
A
Abstract:
To provide a ceramic heater for semiconductor manufacturing/ inspecting equipment, capable of realizing uniform temperature distribution of a semiconductor wafer and capable of rapidly raising the temperature of the semiconductor wafer.
This ceramic heater for semiconductor manufacturing/inspecting equipment comprises a circular-shaped ceramic substrate, on the surface or inside of which a plurality of circuits constituted by resistive heating elements are formed, wherein at least one of the circuits constituted by the resistive heating elements is formed on the outside of the area on which the object to be heated is mounted.
Inventors:
SUGIMOTO KEIZO
Application Number:
JP2001123275A
Publication Date:
October 31, 2002
Filing Date:
April 20, 2001
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
H05B3/20; H01L21/02; H01L21/027; H01L21/68; H01L21/683; H05B3/10; H05B3/16; H05B3/18; (IPC1-7): H01L21/02; H01L21/027; H01L21/68; H05B3/10; H05B3/16; H05B3/18; H05B3/20
Attorney, Agent or Firm:
Yasuo Yasutomi (2 outside)